Abstract
This paper presents design of a frictionless magnetorheological (MR) damper which can be used for the integrated isolation mount for ultra precision exposure system. The vibration sources of the ultra precision exposure system can be classified as two. The one is environmental vibration from the floor, and the other is transient vibration occurred from the stage moving. The transient vibration has serious adverse effect to the process because the vibration scale is quite larger than other vibrations. Therefore, in this research, the semi-active MR damper which can control the transient vibration is devised. In addition, the stage needs to be isolated from tiny vibrations. For this purpose, a dry friction of the MR damper must be removed. In order to achieve this goal, a frictionless MR damper is originally designed. The designed MR damper is modeled, manufactured and it’s damping force characteristics are experimentally evaluated. Vibration control performance of the proposed MR damper is also evaluated.